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MEMS Integration

  MEMS Applications
  Bonding Process
  MEMS Design Rules
  Contact Us For MEMS Information

We provide "turnkey" solutions for all your micromachining vacuum packaging needs. This includes getter integration, wafer bonding for chip-scale packages, ceramic packages and getter activation. NanoGetters has been used with solders, glass reflow and vacuum welded lids in addition to wafer to wafer bonding.

“NanoGetters® Technology has improved our ability to obtain and hold low pressures in our MEMS resonators. We consistently get high Q values, as high as 20,000, with our resonators using NanoGetters®.”

- Jim Cripe, MEMS Test Engineer.


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