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Pricing

NanoGetter® MEMS Price Sheet

For 100mm wafers only, in cases where the NanoGetters® are deposited on a capping wafer.

Quantity

Total Turnkey Solution:
Silicon Cap Wafers with NanoGetters®, and Bonding

Silicon Cap Wafers with NanoGetters® and Frit Printing
(No Bonding)

NanoGetter® Deposition Only
(No Cap Wafer Fabrication or Bonding)

< 100 wafers

$1200/wafer

$850/wafer

$400/wafer

1000 wafers

$710/wafer

$560/wafer

$195/wafer

10,000 wafers

$280/wafer

$230/wafer

$90/wafer

Tooling Charges*

$6,000

$6,000

$3,000

For intermediate and higher volumes, glass wafers, NanoGetter® patterning on device wafers or other wafer diameters please contact us for a customized quote.

*There is a one-time tooling charge for all new wafer cap and NanoGetter® mask designs. Tooling charges for the NanoGetter® mask may not apply for eutectic and solder wafer bonding, contact us for discussions on your process and wafer cap design. Customer supplied masks may also reduce the tooling costs.


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