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NanoGetter® MEMS Price Sheet

For 100mm wafers only, in cases where the NanoGetters® are deposited on a capping wafer.


Total Turnkey Solution:
Silicon Cap Wafers with NanoGetters®, and Bonding

Silicon Cap Wafers with NanoGetters® and Frit Printing
(No Bonding)

NanoGetter® Deposition Only
(No Cap Wafer Fabrication or Bonding)

< 100 wafers




1000 wafers




10,000 wafers




Tooling Charges*




For intermediate and higher volumes, glass wafers, NanoGetter® patterning on device wafers or other wafer diameters please contact us for a customized quote.

*There is a one-time tooling charge for all new wafer cap and NanoGetter® mask designs. Tooling charges for the NanoGetter® mask may not apply for eutectic and solder wafer bonding, contact us for discussions on your process and wafer cap design. Customer supplied masks may also reduce the tooling costs.

© NanoGetters®, Inc. is a registered trademark with the US Patent and Trademark Office. All rights reserved.