Dedicated Fabrication Facility - Class 100 Clean Rooms

Manufacturing & Facilities: Dedicated Fabrication Facility

Located in Ypsilanti, Michigan, ISSYS' facility is just a short drive from either Ann Arbor or Detroit Metropolitan airport. The 11,000 square foot facility includes nearly everything required for the design, development, and production of MEMS-based products

ISSYS' facility supports both production and research and development activities. Production is completed in clean rooms, chemical labs, and a back-end packaging and production area supported by specialized utilities and waste disposal capabilities. Design and testing is completed in ISSYS' computer simulation lab, sensing and electronics characterization and testing labs , prototype machine shop , and ISSYS' offices.

ISSYS Class 100 Clean Room

Dedicated Fabrication Facility/Clean Rooms:

To consistently and repeatably produce its products, ISSYS has established a comprehensive, quality-focused MEMS manufacturing facility including a certified Class 100 Clean Room, chemical labs, characterization labs, and centralized utilities.

ISSYS' two clean rooms house the bulk of ISSYS' MEMS-fabrication equipment, including:

Sputter Deposition System
STS Deep Reactive Ion Etcher
Plasma Oxygen Asher
Solvent Bench
Acid/Base Benches
Photoresist Spin Coater
Rinser/Dryer Tools
Evaporator
Programmable Ovens
Electronic Visions Aligner
Electronic Visions Bonder
Mega Sonic Cleaner
Ultra Sonic cleaner
Screen printer for glass frit handling

Chemical Labs:

ISSYS operates two independent chemical laboratories to support its MEMS processes. The first laboratory supports DWP and KOH wet chemical etching processes, including the EDP Reactor Cell. The second laboratory is dedicated to the development and characterization of corrosion-resistant technologies. Both chemical laboratories are equipped with permanent full-faced fume hoods.

Assembly, Characterization & Testing Laboratories:

Environmental chamber & other testing equipment

ISSYS' characterization laboratories provide feedback for individual process steps and finished sensor performance.

ISSYS' assembly and packaging equipment includes:

Microelectronics Wafer Dicing Saw
Wire Bonder
Automated Drill

ISSYS' test and characterization equipment includes:

WYKO Optical Profilometer
Dektak Profilometer
Scanning Electron Microscope (SEM)
Optical microscope
Stereo Microscopes
Nanoscope
Force Pull Tester
Wet/Dry Vented Hoods
Function Generator
Universal Source
Probe Stations Optical Microscopes
Corrosive Gas Exposure System
Helium Leak Test Tool
Environmental Test Chamber
Custom-Made Pressure Characterization System
LCR Meter
Gain Phase Analyzer
Oscilloscopes

Prototype Machine Shop:

To permit fast and cost-effective turnaround on prototype packaging options, ISSYS has an in-house machine shop.

Specialized Utilities:

ISSYS has installed specialized utilities to support its design and manufacturing processes.

To maintain the ultra-clean environment required to manufacture MEMS devices and support its equipment, ISSYS has installed specialized utilities including:

Dedicated 480 watt electrical service
18 megaohms-cm deionized water system
Chilled water system
Dedicated nitrogen, compressed air, and vacuum supplies
Comprehensive hazardous waste management system
Cold storage facility for chemicals