Products & Services: Industrial Pressure
Sensing Product Family
Ultra-High Resolution Products
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| Exterior package and electronics for
ultra-high resolution pressure sensor |
ISSYS is developing some of the world's most sensitive capacitive pressure
sensing devices. ISSYS' goal is to design, develop, and manufacture the
next generation of critical semiconductor process control equipment. These
devices will enable highly accurate process control of very sensitive
semiconductor fabrication, especially with migration to larger wafers
by providing:
- High sensitivity pressure measurement
- Unprecedented accuracy at low pressures
- Stability & reliability
- Easy fit with current equipment
- Lower cost
ISSYS anticipates delivering the best available sensitivity and accuracy
at much lower pressures compared with sensors currently available.
Key Specifications
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| Challenge = Diaphragm size |
| • |
The challenge of fabricating
ISSYS' ultra-sensitive pressure sensor diaphragm is analogous
to the task of holding a sheet one foot thick covering 71 football
fields one foot above the ground with less than one inch height
or thickness variation. |
| • |
The difficulty of fabricating
the diaphragm is geometrically proportional to the area - the
larger the diaphragm, the more difficult the fabrication. |
| • |
ISSYS manufactures diaphragms
with the highest area to thickness ratio of any device in the
world and is the only organization in the world to have accomplished
this task. |
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ISSYS' initial product entry will target a highly attractive void in
the currently available products - an ultra-high resolution pressure sensing
system that:
- Operates in ranges of 0 to 1 torr, 0 to 0.1 torr, and 0 to 0.01 torr
with unparalleled accuracy
- Delivers accuracy of better than 0.05% at prototype level.
- Is vacuum-referenced, temperature compensated, and self-testing capable
- Incorporates a modular design that supports ISSYS' corrosion resistant
electronics and packaging. This combination means that the sensors can
provide ultra high resolution in some of the toughest environments.
ISSYS anticipates creating a family of products with different operating
ranges and accuracies to serve different market needs, including the lower
end needs where price is more important and measurement accuracy is less
critical.
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