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News & Publications: Press Releases Ann Arbor, MI: A three year, US Defense Advanced Research Projects Agency contract for the development of flexible manufacturing of dissolved-wafer silicon capacitive sensors has been awarded to Integrated Sensing Systems (ISSYS), Inc., Ann Arbor, Michigan. The award is part of a DARPA-MEMS initiative under the Broad Agency Announcement. As part of this contract ISSYS, Inc. will develop and demonstrate flexible
manufacturing of dissolved wafer silicon capacitive pressure and flow
sensors |
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