MEMS Foundry Services : Overview

ISSYS' services range from single-step processing to prototyping to qualified second source to full manufacturing to technical consulting.

Please contact us for more information about how we can help you produce your product.

Prototype development

Volume production/outsourced manufacturing

Technical and design consulting

NanoGetter^® Integration

Single-step processing

• Deep Reactive Ion Etching
• Photolithography
• Anodic/Electrostatic Bonding
• Silicon Direct Fusion Bonding
• Screen Printing & Glass Frit Bonding
• Metalization
• KOH Etching
• Metalization
• KOH Etching
• EDP Etching
• Dicing
• Shadow Mask
• Wet Processes
• Thermal Oxidation
• Wyko Surface Profiler
• Nanoscope
• Scanning Electron Microscope (SEM)